光束稳定技术是光刻机照明系统中一项重要的单元技术，其作用是将激光器出射的经长距离传输后的光束稳定在需要的指向和位置上，以保证照明系统具有稳定的光强分布。光束稳定系统主要由光束测量和光束转向两个功能模块组成，推导了两个模块之间的光束传递矩阵，并基于LabView搭建了光电闭环控制实验系统。对系统性能进行了测试，通过人为引入已知光束漂移量得到如下结果：系统的指向稳态误差低于±3 μrad，位置稳态误差低于±0.04 mm，系统调整时间小于80 ms。结果表明该系统可以精确地把光束稳定在需要的指向和位置。

A scanning Hartmann test method is proposed and its measurement principle is described. The scanning Hartmann test setup is formed by modifying the Hartmann screen of the conventional Hartmann test setup. With the rotation of the scanning Hartmann screen and the improved hole arrangement, the whole information of the lens to be tested in the full aperture can be obtained. The measurement accuracy of the aberration is improved and the local error of the lens can be got. In the method, no change of the Hartmann screen is needed for measuring the lenses of different aperture sizes. Experimental results of aberration measurements of two lenses are given to verify the usefulness of the setup.

An optical biosensor with up-converting phosphor (UCP) marker is developed for the sensitive rapid immunoassay to the specific biomolecule. UCP can emit visible light when excited by infrared light. Through detecting and analyzing the content of UCP particles on the test strip after immunoreaction, the concentration of target analyte in the sample can be obtained. The detection sensitivity to plague IgG is better than 5 ng/ml; to plague FI-Ab is better than 100 pg/ml; to plague Yersinia pestis cell is better than 3*10^(4) CFU/ml. Good linear response characteristics and an excellent correlation (R2>=0.95) have been verified by quantitative detection results. In the practical application, detection results to 167 analytic samples have an excellent consistency with those obtained by reverse hemagglutination test. The up-converting phosphor technology (UPT) based biosensor has stable, reliable, and sensitive performances. It can meet the need of various bioassay applications.